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WF6

Product number：

WF6

Features

Tungsten hexafluoride is mainly used in chemical vapor deposition (CVD) process of metal tungsten in electronic industry, and the tungsten silicide (WSi2) made from it can be used as wiring material in large scale integrated circuits. In addition, tungsten hexafluoride is also used to manufacture semiconductor electrodes and conductive paste. 
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Product Details

WF6 electronic grade tungsten hexafluoride 5N 

Application

Tungsten hexafluoride is mainly used in chemical vapor deposition (CVD) process of metal tungsten in electronic industry, and the tungsten silicide (WSi2) made from it can be used as wiring material in large scale integrated circuits. In addition, tungsten hexafluoride is also used to manufacture semiconductor electrodes and conductive paste. 

Production capacity

100t/year (after the 4,600t project is completed, it can reach 700t/year) 

Product index 

Technical index of light component impurities （10-6）Degree of purity 99.999%

Project

O2

N2

CO

CO2

CF4

SF6

SiF4

HF

Index

≤0.5

≤1.0

≤0.5

≤0.5

≤0.5

≤0.5

≤0.5

≤5.0

Metallic impurity （10-9，Mass fraction ）

Project

Fe

K

Na

Cr

Th

U

Co

Pb

Index

≤20

≤20

≤15

≤10

≤0.1

≤0.1

≤10

≤10

Project

Ca

Mg

Ni

Cu

Al

Mn

Mo

Zn

Index

≤10

≤10

≤20

≤10

≤20

≤20

≤100

≤10

Packing specifications 

Cylinder volume 

10L

40L

Cylinder capacity 

15kg

50kg

Bottle specification 

CGA638

CGA638

Or provide other specifications of packaging according to customer requirements 

Keywords: gas products, electronic special gas

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