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CF4

Product number：

CF4

Features

CF4, also known as tetrafluoromethane and R14, is a colorless, non-toxic, non-combustible and slightly ethereal non-corrosive gas. It is usually stored in a compressed state and transported at high pressure, its properties are very stable. It is one of the main plasma etching gases in the semiconductor industry at present, and it is widely used for etching silicon, silicon dioxide, silicon nitride, metal silicide and some etchings of metal. Besides, it is also widely used in low-temperature refrigeration, surface cleaning of electronic devices, meteorological insulation, etc.
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Product Details

CF4 electronic grade carbon tetrafluoride 5N-5N7

Application

CF4, also known as tetrafluoromethane and R14, is a colorless, non-toxic, non-combustible and slightly ethereal non-corrosive gas. It is usually stored in a compressed state and transported at high pressure, its properties are very stable. It is one of the main plasma etching gases in the semiconductor industry at present, and it is widely used for etching silicon, silicon dioxide, silicon nitride, metal silicide and some etchings of metal. Besides, it is also widely used in low-temperature refrigeration, surface cleaning of electronic devices, meteorological insulation, etc.

Production capacity

450 t/year (after the 4,600t project is completed, it can reach 1450t/year)

Product index

Project name

CF4  10-2

N2 10-6

O210-6

CO 10-6

CO210-6

SF610-6

Acidity10-6

Other halocarbons F-C 10-6

H20 10-6

5N

≥99.999

≤4

≤1

≤0.1

≤1

≤1

≤1

≤1

≤1

5.8N

≥99.9998

≤1

≤0.5

≤0.1

≤0.4

≤0.1

≤0.1

≤0.5

≤0.5

Packing specifications

Cylinder volume

43L

47L

40ft ISO

Cylinder capacity

26kg

30kg

12400kg

Bottle specification

CGA580

CGA320/CGA580

DISS716

Or provide other specifications of packaging according to customer requirements 

Keywords: gas products, electronic special gas

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