Business
SF6
Product number：
SF6
Features
Product Details
SF6 Electronic grade sulfur hexafluoride 5N
Application
Electronic grade sulfur hexafluoride is mainly used as cleaning agent and plasma etching agent for chemical vapor deposition in semiconductor and electronic industries, and is widely used in TFT-LCD, semiconductor and solar panels, etc.
Production capacity
1000t/year
Product index
|
Project name |
SF610-2 |
CF4 10-6 |
N2 10-6 |
O2+Ar 10-6 |
CO 10-6 |
CO210-6 |
CH4 10-6 |
Acidity10-6 |
HydrolyzableFluoride 10-6 |
H20 10-6 |
|
5N |
≥99.999 |
≤0.5 |
≤2 |
≤2 |
≤0.5 |
≤0.5 |
≤0.5 |
≤0.1 |
------ |
≤3 |
|
5.5N |
≥99.9995 |
≤0.1 |
≤2 |
≤1 |
≤0.1 |
≤0.3 |
≤0.1 |
≤0.004 |
≤0.8 |
≤1 |
Packing specifications
|
Cylinder volume |
40L/43.3L/47L/48.8L |
440L/470L |
40ft ISO |
|
Cylinder capacity |
50kg |
500kg |
12400kg |
|
Bottle specification |
CGA590/DISS716 |
DISS716 |
DISS716 |
Keywords: gas products, electronic special gas
Add：No. 12, South Road, Science and Technology Park, Jili District, Luoyang City, Henan Province
Tel：86-0379-66961195
Email：liudaqu@sinochem.com
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